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  • Spare Parts Of Sealing Elements For ZY-1211 Multi-Arc Ion PVD Coating Machine

    Spare Parts Of Sealing Elements For ZY-1211 Multi-Arc Ion PVD Coating Machine
    List of Spare Parts
    Product Details:


    List of Spare Parts


    NO.ItemMaterialQtyPurpose
    1Seal ring φ 2.5x2.5
    FKM
    2
    Thermometry
    2O ring φ 15x4FKM4Gauge holder set
    3O-ring φ 25x4FKM12Heater set
    4Oil seal 15x35x10Rubber Ⅰ1Electric grating valve
    5O-ring φ 42x4NBR2Electric grating valve
    6O-ring φ 105x4FKM3Inspection window set
    7O-ring φ 85x4FKM6Inspection window set
    8Oil seal 8x22x7FKM6Inspection window set
    9O-ring φ 20x4FKM3Inspection window set
    10O-ring φ 84x5FKM1Drive shaft
    11Oil seal 35x55x12FKM3Drive shaft
    12O-ring φ 90x5FKM1Drive shaft
    13O-ring φ 170x6NBR1Unit
    14O-ring φ 110x6NBR1Unit
    15O-ring φ 25x4FKM12Heater blind plate
    16O-ring φ 198x7FKM12Arc source blind plate
    17O-ring φ 200x8FKM1Cathode blind plate
    18O-ring φ 95x4FKM1Anode blind plate
    19O-ring φ 90x5FKM1Swivel holder blind plate
    20O-ring φ 45x3.2FKM2Grating valve blind plate
    21O-ring φ 285x6FKM3Trinity valve
    22O-ring φ 245x5FKM3Trinity valve
    23O-ring φ 64x4FKM3Trinity valve
    24O-ring φ 24x4FKM9Trinity valve
    25O-ring φ 570x10FKM1Trinity valve
    26O-ring φ 68x5FKM1300 By-pass valve
    27O-ring φ 95x4FKM1300 By-pass valve
    28O-ring φ 24x4FKM3300 By-pass valve
    29O-ring φ 52x4FKM1300 By-pass valve
    30O-ring φ 51x4FKM2100 Valve
    31O-ring φ 24x4FKM6100 Valve
    32O-ring φ 100x5FKM2100 Valve
    33Lip-type packing L4310Vacuum rubber1Cylinder
    34O-ring φ 105x4FKM12Inspection window set

    35

    O-ring φ 85x4FKM24Inspection window set
    36Ground glass φ 78x4Glass
    12Inspection window set
    37Oil seal 8x22x7FKM24Inspection window set
    38
    O-ring φ 20x4FKM12Inspection window set


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