IKS PVD Technology (Shenyang) Co.,Ltd
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  • IKS PVD Technology (Shenyang) Co.,Ltd
  • Tel:+86-24-89635131
  • Fax:+86-24-89335192
  • Email:IKS.PVD@foxmail.com
  • ADD:No.83-42 Puhe Road, Shenbei New District, Shenyang City, Liaoning Province, China
  • Vacuum Coating Accessories

    We provide high quality and frequently-used PVD vacuum accessories in different specifications, such as vacuum pump, vacuum valve, vacuum power suply, pure targets, MFM, vacuum bellows, various O-rings, Oil seals, vacuum gauge, vacuum grease and so on. With the certification of ISO9001, these vacuum accessories are attractive in price and quality.
    • Rotatable Sputtering Target
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      Rotatable Sputtering Target

      High Quality Rotatable Sputtering Target IKS specializes in producing high purity rotatable sputtering targets with the optimal process stability and performance for application in semiconductor, physical vapor deposition (PVD) display and optical industry. Our targets are offered in your...
    • High Purity Planar Sputtering Target
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      High Purity Planar Sputtering Target

      High Quality Planar Sputtering Target IKS provides high-quality planar sputtering targets for a wide range of applications for ferromagnetic, complex oxides, and semiconducting films. Our targets are offered in various purity levels to suit your specific requirements with the minimum purity of...
    • Multi-arc Target
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      Multi-arc Target

      High Quality Multi-arc Targets IKS provides high-quality multi-arc targets for a wide range of applications for ferromagnetic, complex oxides, and semiconducting films. Our targets are offered in various purity levels to suit your specific requirements with the minimum purity of 99.5% up to...
    • Compound Molecule Pump
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      Compound Molecule Pump

      TYFB-1600 Compound Molecular Pump Introduction TYFB-1600 compound molecular pump consists of a turbo-molecular pump and a plate drag pump. The turbo-molecular pump features high speed of degassing quantity and high compressive ratio while in molecular flow. Drag pump features high speed of...
    • Low Pressure ΠMFC Mass Flow Controller - PFC-20
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      Low Pressure ΠMFC Mass Flow Controller - PFC-20

      The PFC-20, Low Pressure πMFC mass flow controller provides maximum utilization of Safe Delivery Source gases. Implementation of the Low Pressure πMFC increases tool uptime by reducing the frequency of source gas cylinder changes. It offers accurate and precise control of low gas...
    • General Purpose Mass Flow Controller - MKS 1179C
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      General Purpose Mass Flow Controller - MKS 1179C

      The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 mass flow controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as...
    • High Precision Vacuum Gauges Porter™ CDG020D 10~1000 Torr / Mbar
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      High Precision Vacuum Gauges Porter™ CDG020D 10~1000 Torr / Mbar

      INTRODUCTION The INFICON Porter™ CDG020D Capacitance Diaphragm Gauge is a high quality, cost effective, gas type independent absolute pressure sensor. The Porter is designed for stable long time performance in industrial environments. The ceramic sensor provides excellent span stability over...
    • VGC50x Vacuum Gauge Controller
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      VGC50x Vacuum Gauge Controller

      Sustainable solution for process measurement, control and data log INTRODUCTION Compatible to the wide range of INFICON active gauges, the new VGC50x series of active gauge controllers are able to monitor and data log the entire pressure range from 10⁻¹⁰ to 1500 mbar (10⁻¹⁰ to 1125 Torr) and the...
    • Compatible Vacuum Gauges And Controllers CDG045D 0.05~1000Torr / Mbar
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      Compatible Vacuum Gauges And Controllers CDG045D 0.05~1000Torr / Mbar

      INTRODUCTION INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control. CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability. They are available for full scale ranges from 50 mTorr to 1000 Torr, with...
    • Compatible Vacuum Gauges And Controllers CDG025D 0.1~1000 Torr/mbar
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      Compatible Vacuum Gauges And Controllers CDG025D 0.1~1000 Torr/mbar

      INTRODUCTION The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as...
    • ZJ-52T Type Resistance Vacuum Gauge
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      ZJ-52T Type Resistance Vacuum Gauge

      Introduction This type of gauge adopts stable heat treated hot filament that has tiny heat capacity as the vacuum sensor. It also has the function of automatic temperature compensation and dust protection. The gauge has the advantages of wide range, fast response, anti-pollution, oxidation...
    • Double Resistance Single Ionization Composite Vacuum Gauge
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      Double Resistance Single Ionization Composite Vacuum Gauge

      Composite vacuum measuring instrument (ZDF series) Double resistance single ionization composite vacuum gauge Introduction ZDF-X series resistance/ionization compound vacuum gauge can independently complete low vacuum (1×10 5 ~1×10 -1 Pa) measurement based on the one resistance unit. Another...
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    We're one of leading manufacturers and suppliers of vacuum coating accessories in China, also supporting customized service. Welcome to buy quality vacuum coating accessories made in China here.