IKS PVD Technology (Shenyang) Co.,Ltd
Home > Product > Vacuum Coating Accessories > Sputtering Target

Product Categories

Contact Information

  • HQ -Foreign Trade Department
  • IKS PVD Technology (Shenyang) Co.,Ltd 
  • Phone:008615040177271 (Wechat/WhatsApp)
  • Email:  IKS.PVD@foxmail.com
  • Add:No.83-42,Puhe Road, Shenbei New District, Shenyang, 110000, Liaoning, China
  •        
  • Worldwide Sales Representative
  • KING TECH CORPORATION
  • Tel:+886-6-2137155
  • Fax:886-6-2137667
  • Email:info@kingtechcorp.com
  • ADD:Rm. B2, 10F., No.189, Sec. 1, Yongfu Rd., West Central Dist., Tainan City 70051, Taiwan.
  • Multi-arc Target

    Multi-arc Target
    High Quality Multi-arc Targets IKS provides high-quality multi-arc targets for a wide range of applications for ferromagnetic, complex oxides, and semiconducting films. Our targets are offered in various purity levels to suit your specific requirements with the minimum purity of 99.5% up to...
    Product Details:

    High Quality Multi-arc Targets

     

    IKS provides high-quality multi-arc targets for a wide range of applications for ferromagnetic, complex oxides, and semiconducting films. Our targets are offered in various purity levels to suit your specific requirements with the minimum purity of 99.5% up to 99.99% for pure elements and alloys.

     

    Adopting advanced technologies such as hot isostatic pressing (HIP), vacuum sintering and vacuum melting process, our multi-arc targets are characterized by high purity, high density, homogenous composition, uniform grain size and high utilization. We monitor every step (from the raw materials to the finished products) to make sure that only high-quality targets can be shipped from our factories.

     

    IKS manufactures all shapes and sizes of high quality multi-arc targets. Let us know the material and dimensions you need and we will meet your special requirement.

    1_副本.jpg 2_副本.jpg

     

    Main Products:

    Material

    Symbol

    Atomic Ratio

    Purity

    Relative Density

    Stock Dimensions

    Technology

    Features

    Chromium

    Cr

    _____

    99.5%~99.95%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Hot Isostatic

    Pressing (HIP)

    Good Oxidation Resistance

    Tungsten

    W

    _____

    99.9%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Hot Isostatic

    Pressing (HIP)

    High Hardness

    Titanium

    Ti

    _____

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Melting

    Good WearResistance

    Nickel

    Ni

    _____

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Melting

    Great Corrosion Resistance

    Molybdenum

    Mo

    _____

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Melting

    Great Corrosion Resistance

    Silicon

    Si

    _____

    99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Sintering

    High Hardness

    Silver

    Ag

    _____

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Melting

    Good Electrical and Thermal Conductivity

    Tantalum

    Ta

    _____

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Melting

    High Ductility

    Copper

    Cu

    _____

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Melting

    Good Ductility, Thermal Conductivity and Corrosion Resistance

    Graphite


    _____

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Sintering

    High Hardness

    Aluminum

    Al

    _____

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Vacuum Melting

    Good Ductility,Thermal Conductivity and Corrosion Resistance

    Silicon-Aluminum

    SiAl

    25/75

    30/70

    40/60

    50/50

    99.9%~99.99%

    >99%

    Dia100xH40mm

    Dia95x45mm

    Hot Isostatic    Pressing (HIP)

    High Ductility and Good Wear Resistance

    Titanium-Aluminum

    TiAl

    30/70

    33/67

    40/60

    45/55   50/50

    60/40

    70/30

    75/25

    80/20

    >99.7% (2N7)

    >99%

    Dia100x40/95x32mm
         Dia63x40/65x32mm

    Hot Isostatic   Pressing (HIP)

    High Mechanical Strength and Good Corrosion Resistance

    Chromium-Aluminum

    CrAl

    25/75

    30/70

    40/60

    50/50

    >99.7% (2N7)

    >99%

    Dia100x40/95x32mm

    Dia63x40/65x32mm

    Hot Isostatic

    Pressing (HIP)

    Good Oxidation Resistance and Corrosion Resistance

    Titanium-Aluminum-Silicon

    TiAlSi

    30/60/10   40/50/10

    >99.7% (2N7)

    >99%

    Dia100x40/95x32mm

    Dia63x40/65x32mm

    Hot Isostatic

    Pressing (HIP)

    High Hardness and Ductility

    Chromium-Aluminum-Silicon

    CrAlSi

    30/60/10   40/50/10

    >99.7% (2N7)

    >99%

    Dia100x40/95x32mm

    Dia63x40/65x32mm

    Hot Isostatic

    Pressing (HIP)

    Good Oxidation Resistance and Corrosion Resistance


    More information:

    Certification: ISO9001

    Average Grain Size: 30-40μm (national standard is 100μm)

    Other special specifications are available on customer’s request.


    3_副本.jpg 4(001).jpg


    Quality Analysis of CrAl Sputtering Target

    (Take CrAl 30/70 at% as a sample)

    Main component (wt%)

    Impurity content (%)

    CrAl

    C

    N

    O

    Fe

    Si

    S

    >99.7

    0.01

    0.006

    0.17

    0.02

    0.07

    0.002

    Cr

    Al





    balance

    54.75





    Dimension: Dia 65x40 mm

    True density: 3.764(g/cm3)

    Theoretical density: >99%


    5.jpg

    The average grain size of our multi-arc target is 30-40μm which is far below the national standard (100μm).


    The IKS Advantages:

    ● Variety of materials including: Silver, Titanium, Aluminum, Silicon, Silicon-Aluminum Titanium-Aluminum-Silicon, Graphite and so on to suit your requirements.

    ● Extremely high material utilization (about 80%) ensures lower consumption of raw materials and save your costs.

    ● Provide thick & dense film with extremely smooth surface.

    ● Multi-layer films & multi process films are possible

    ● Ensure the high efficiency of coating process and availably increase the throughput of the coating machine.


    8_副本.jpg9_副本.jpg

    6_副本.jpg7_副本.jpg


    Application:

    ● Tool and moulds surface treatment

    ● Architectural  and auto glass

    ● Hardware and decoration

    ● Flat panel display

    ● Solar photovoltaic

    ● Other fields

     

    Our cathodic arc targets are best choice for providing hard surfaces with excellent corrosion resistance and wear resistance for cutting tools, punching and forming moulds to increase their service time, give them the higher feed speeds, cutting performance and metal removal rates can be achieved easily.



    Related Products
    Feedback: