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  • Compatible Vacuum Gauges And Controllers CDG025D 0.1~1000 Torr/mbar

    Compatible Vacuum Gauges And Controllers CDG025D 0.1~1000 Torr/mbar
    INTRODUCTION The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as...
    Product Details:


    INTRODUCTION


    The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.


    The INFICON  SKY  CDG025D Capacitance Diaphragm Gauges are direct replacements for the Oerlikon Leybold  CTR 100 transmitters.  Get the original from the manufacterer with global support and solutions for all applications.



    BENEFITS


    ◆ Fully compatible with CTR 100 transmitters

    ◆ Full scale ranges from 100 mTorr … 1000 Torr

    ◆ Fast stability after power on

    ◆ Fast recovery from atmospheric pressure

    ◆ Corrosion resistant ceramic sensor

    ◆ Excellent long term signal stability

    ◆ Temperature compensated

    ◆ Sensor protected from contamination

    ◆ One pushbutton zero function

    ◆ Wide range power supply



    TYPICAL APPLICATIONS


    ◆ Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD

    ◆ Data storage and display manufacturing equipment

    ◆ Industrial vacuum equipment

    ◆ General high accuracy pressure measurement



    SPECIFICATION


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    Type

    1000 Torr 

    / 1100 mbar

    500 ... 10 Torr / mbar1 Torr / mbar0.25 Torr

    0.1 Torr

    / mbar

    Accuracy% of reading0.20.20.20.250.5
    Temperature effect
    on zeropercent FS/°C0.0050.0050.0150.020.02
    on span% of reading / °C0.01
    0.010.010.030.03
    Resolutionpercent FS0.0030.0030.0030.0030.003
    Pressure, max.kPa (absolute)400260260130130

    Response time 

    ms303030130130
    Lowest readingpercent FS0.010.010.010.010.01
    Lowest suggested readingpercent FS0.050.050.050.050.05
    Lowest suggested control pressurepercent FS0.50.50.50.50.5
    Temperature

    Operation 

    (ambient)

    °C+5 … +50+5 … +50+5 … +50+5 … +50+5 … +50
    Bakeout at flange°C≤110≤110≤110≤110≤110
    Storage°C–40 … +65–40 … +65–40 … +65–40 … +65–40 … +65
    Supply voltageV (dc)+14 … +30+14 … +30+14 … +30+14 … +30+14 … +30

    Power 

    consumption

    W≤1≤1≤1≤1≤1

    Output signal 

    (analog)

    V (dc)0 … +100 … +100 … +100 … +100 … +10

    Degree of 

    protection


    IP 30IP 30IP 30IP 30IP 30
    Standards
    CE conformity

    EN 61000‑6‑2, EN 

    61000-6-3, EN 61010 & RoHS

    EN 61000‑6‑2, EN 

    61000-6-3, EN 61010 & RoHS

    EN 61000‑6‑2, EN 

    61000-6-3, EN 61010 & RoHS

    EN 61000‑6‑2, EN 

    61000-6-3, EN 61010 & RoHS

    EN 61000‑6‑2, EN 

    61000-6-3, EN 61010 & RoHS

    ETL certification

    UL 61010‑1, CSA 22.2 No.

    61010‑1

    UL 61010‑1, CSA 22.2 No.

    61010‑1

    UL 61010‑1, CSA 22.2 No.

    61010‑1

    UL 61010‑1, CSA 22.2 No.

    61010‑1

    UL 61010‑1, CSA 22.2 No.

    61010‑1

    Electrical 

    connection


    D-sub, 15 pole, male

    D-sub, 15 pole, male

    D-sub,15 pole, male

    D-sub,15 pole, male

    D-sub,15 pole, male

    Materials exposed to vacuum

    Aluminum 

    oxide ceramic (AI2O3), 

    Vacon 70, 

    stainless steel (AISI 316L ),

    AgCuTi hard 

    solder, sealing glass

    Aluminum 

    oxide ceramic (AI2O3), 

    Vacon 70, 

    stainless steel (AISI 316L ), 

    AgCuTi hard 

    solder, sealing glass

    Aluminum 

    oxide ceramic (AI2O3), 

    Vacon 70, 

    stainless steel (AISI 316L ), 

    AgCuTi hard 

    solder, sealing glass

    Aluminum 

    oxide ceramic (AI2O3), 

    Vacon 70, 

    stainless steel (AISI 316L ), 

    AgCuTi hard 

    solder, sealing glass

    Aluminum 

    oxide ceramic (AI2O3), 

    Vacon 70, 

    stainless steel (AISI 316L ), 

    AgCuTi hard 

    solder, sealing glass

    Internal volume
    1/2'' tubecm³ (in.³)3.6 (0.22)
    DN 16 ISO KFcm³ (in.³)3.6 (0.22)
    DN 16 CF-Rcm³ (in.³)3.6 (0.22)
    8 VCR®cm³ (in.³)3.6 (0.22)












































































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