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  • Compatible Vacuum Gauges And Controllers CDG045D 0.05~1000Torr / Mbar

    Compatible Vacuum Gauges And Controllers CDG045D 0.05~1000Torr / Mbar
    INTRODUCTION INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control. CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability. They are available for full scale ranges from 50 mTorr to 1000 Torr, with...
    Product Details:


    INTRODUCTION


    INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control. CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability. They are available for full scale ranges from 50 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding vacuum applications.


    The INFICON  SKY  CDG045D Capacitance Diaphragm Gauges are direct replacements for the Oerlikon Leybold  CTR 101 transmitters.  Get the original from the manufacterer with global support and solutions for all applications.




    BENEFITS


    ◆ Fully compatible with CTR 101 transmitters

    ◆ Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption

    ◆ Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points

    ◆ Easy one push button or remote signal zero command, zero offset adjustable

    ◆ Diagnostic port for quick service and maintenance

    ◆ Two year warranty, longer life time with advanced heating concept and gauge protection

    ◆ No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications

    ◆ Compliance & standards: CE, EN, UL, SEMI, RoHS




    TYPICAL APPLICATIONS


    ◆ Etch, CVD, PVD and other semiconductor production processes

    ◆ Chemical and corrosive vacuum processes

    ◆ General thin film and vacuum processes

    ◆ Reference sensor for monitoring of test instruments according to international standards

    ◆ Transfer standard for traceability measurements




    SPECIFICATION


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    Type


    1000 Torr ,1100 mbar

    500 ... 1Torr / mbar

    0.5...0.05 Torr / mbar

    Accuracy

    % of reading

    0.15

    0.15

    0.15

    Temperature effect

    on zero

    percent FS/°C

    0.0025

    0.0025

    0.0025

    on span

    % of reading / °C

    0.01

    0.01

    0.01

    Resolution

    percent FS

    0.003

    0.003

    0.003

    Pressure, max.

    kPa (absolute)

    400

    260

    130

    Lowest reading

    percent FS

    0.01

    0.01

    0.01

    Lowest suggested 

    reading

    percent FS

    0.05

    0.05

    0.05

    Lowest suggested 

    control pressure

    percent FS

    0.5

    0.5

    0.5

    Temperature

    Operation (ambient)

    °C

    +10 … +40

    +10 … +40

    +10 … +40

    Bakeout at flange

    °C

    ≤110

    ≤110

    ≤110

    Storage

    °C

    –20 … +65

    –20 … +65

    –20 … +65

    Supply voltage


    +14 … +30 VDC or ±

    15 V (±5%)

    +14 … +30 VDC or ±

    15 V (±5%)

    +14 … +30 VDC or ±

    15 V (±5%)

     Power consumption

    During heat up

    W

    ≤12

    ≤12

    ≤12

    At operating temperature

     W

     ≤8

     ≤8

     ≤8

    Output signal (analog)

    V (dc)

    0 … +10

    0 … +10

    0 … +10

     Response time

     ms

     30

     30

     130/30

    Degree of protection


    IP 40

    IP 40

    IP 40

    Standards

     CE conformity


    EN 61000‑6‑2/-6-3, 

    EN 61010 & RoHS

    EN 61000‑6‑2/-6-3, 

    EN 61010 & RoHS

    EN 61000‑6‑2/-6-3, 

    EN 61010 & RoHS

     ETL certification


    UL 61010‑1, CSA 

    22.2 No.61010‑1

    UL 61010‑1, CSA 

    22.2 No.61010‑1

    UL 61010‑1, CSA 

    22.2 No.61010‑1

     SEMI compliance


     SEMI S2

     SEMI S2

     SEMI S2

     Electrical connection


    D-sub, 15 pole, male

    D-sub, 15 pole, male

    D-sub,15 pole, male

     Setpoint





     Number of setpoints


     2 (SP1,SP2)

     2 (SP1,SP2)

     2 (SP1,SP2)

     Relay contact

     V(dc)

     ≤30

     ≤30

     ≤30

     Hysteresis

     percent FS

     1

     1

     1

     Diagnostic port

     Protocol


    RS232-C

    RS232-C

    RS232-C

     Read


    pressure, status, ID

    pressure, status, ID

    pressure, status, ID

     Set


    set points, filter, zero 

    adjust, factory reset, 

    DC offset

    set points, filter, zero 

    adjust, factory reset, 

    DC offset

    set points, filter, zero 

    adjust, factory reset, 

    DC offset

    Materials exposed to 

    vacuum


    luminum oxide ceramic 

    (AI2O3), stainless steel (AISI 316L)

    luminum oxide ceramic 

    (AI2O3), stainless steel (AISI 316L)

    luminum oxide ceramic 

    (AI2O3), stainless steel (AISI 316L)

    Internal volume

    1/2'' tube

    cm³ (in.³)

    4.2 (0.26)

    DN 16 ISO KF

    cm³ (in.³)

    4.2 (0.26)

    DN 16 CF-R

    cm³ (in.³)

    4.2 (0.26)

    8 VCR®

    cm³ (in.³)

    4.2 (0.26)






























































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