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  • HQ -Foreign Trade Department
  • IKS PVD Technology (Shenyang) Co.,Ltd 
  • Phone:008615040177271 (Wechat/WhatsApp)
  • Email:  IKS.PVD@foxmail.com
  • Add:No.83-42,Puhe Road, Shenbei New District, Shenyang, 110000, Liaoning, China
  •        
  • Worldwide Sales Representative
  • KING TECH CORPORATION
  • Tel:+886-6-2137155
  • Fax:886-6-2137667
  • Email:info@kingtechcorp.com
  • ADD:Rm. B2, 10F., No.189, Sec. 1, Yongfu Rd., West Central Dist., Tainan City 70051, Taiwan.
  • Low Pressure ΠMFC Mass Flow Controller - PFC-20

    Low Pressure ΠMFC Mass Flow Controller - PFC-20
    The PFC-20, Low Pressure πMFC mass flow controller provides maximum utilization of Safe Delivery Source gases. Implementation of the Low Pressure πMFC increases tool uptime by reducing the frequency of source gas cylinder changes. It offers accurate and precise control of low gas...
    Product Details:


    INTRODUCTION


    The PFC-20, Low Pressure πMFC mass flow controller provides maximum utilization of Safe Delivery Source gases. Implementation of the Low Pressure πMFC increases tool uptime by reducing the frequency of source gas cylinder changes. It offers accurate and precise control of low gas flows over a wide pressure range with source gas delivery pressure as low as 4 Torr.


    This πMFC is the latest in MKS products designed specifically for SDS and VAC ® source gases serving the ion implantation industry. The patented valve and sensor designs offer exceptional zero stability and accuracy for all flow conditions while maintaining the ability to rapidly achieve set point and repeatably control the gas flow. Standard-sized MFC footprint and control I/O are compatible with existing gas lines for easy integration and operation.




    FEATURES & BENEFITS


    ◆ Maximizes SDS source gas utilization reducing bottle changes resulting in higher tool uptime and lower cost-of-ownership

    ◆ Repeatedly controls low gas flows allowing for reduced gas consumption using parameters optimized for implanter source applications

    ◆ Digital control loop provides rapid response to set point minimizing process cycle time

    ◆ Increases tool uptime through reduction of “No Problem Found”: MFC replacements

       — Included embedded diagnostics and software allowing users to check MFC functionality without removing the MFC

       —E-diagnostics through embedded Ethernet interface allows monitoring performance parameters during operation

    ◆ Direct form-fit-function replacement for most common MFCs

    ◆ Reduces inventory costs through multi-gas, multi-range capability

    ◆ Straightforward configuration and diagnostics through Ethernet interface

        — Uses standard web browser – no special software required

        — Includes remote PC application

    ◆ Bright rotatable LED display provides easy viewing of flow rate, gas type, full scale flow range, temperature and Ethernet address




    DIMENSIONAL DRAWING AND PINOUTS


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    SPECIFICATION


    Performance
    Full Scale Ranges (N2 equivalent) 2– 20 sccm
    Inlet Pressure Range 4 – 1200 Torr (with vacuum at the outlet)
    Normal Operating Pressure Differential (N2 equivalent)<10 Torr at F.S. flow (with vacuum at the outlet)
    Maximum Purge Pressure 150 psig
    Burst Pressure1500 psig
    Control Range 2 to 100% of F.S.
    Typical Accuracy  

    ±1% of set point for >10 to 100% F.S. and 

    ±0.2% of F.S. for 2 to 10% of F.S.

    at inlet pressures >20 Torr

    Repeatability0.2% of F.S.
    Resolution0.1% of Reading

    Temperature 

    Coefficients

    Zero±0.08% of F.S./°C
    Span±0.08% of Rdg/°C

    Controller Settling Time (per Semi Guideline E17-0600)

    <2 sec. typical above 10% of F.S. at inlet pressures >10 Torr

    Warm-up Time 

    (to within 0.2% of F.S. of steady state performance)

    <30 min.
    Normal Operating Temperature10 to 50°C
    Storage Humidity0 to 95% Relative Humidity, no condensing
    Storage Temperature -20 to 65°C
    Temperature Display0 to 100°C
    Temperature Readout Units  °C
    Temperature Accuracy±2°C
    Temperature Resolution0.1°C
    Mechanical
    Fittings  Swagelok ® 4 VCR ®
    Display4 digits for value, 4 characters for unit
    Leak IntegrityExternal (scc/sec He) <1x10 -10
    Through Closed Valve<1.0% of FS at 25 psig to atmosphere

    Wetted Materials 

    Standard

    316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 

    316 S.S., Elgiloy, KM-45, NiTi

    Surface Finish5 microinch average Ra
    Weight  Less than 2 lbs. (0.9 kg)
    Electrical
    Connectors Analog (power & I/O) 9 pin D male or 15 pin D male
    DiagnosticsEthernet
    Input Voltage15-24 VDC ±5%VDC @ 350mA peak, 250 mA steady state
    Set Point Command Signal0 to 5 VDC
    Output Signal0 to 5 VDC


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