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  • IKS PVD Technology (Shenyang) Co.,Ltd
  • Tel:+86-24-89635131
  • Fax:+86-24-89335192
  • Email:IKS.PVD@foxmail.com
  • ADD:No.83-42 Puhe Road, Shenbei New District, Shenyang City, Liaoning Province, China
  • Mass Flow Meter

    Mass Flow Meter
    D07-7KM Mass Flow Meter Introduction The mass flow meter (MFC) consists of three basic devices: flow sensor, flow-splitter bypass and printed circuit board, it accurately measures mass flow rates despites gas volume fluctuated due to temperature changes. The MFC is widely applied in the fields...
    Product Details:

    Introduction

    The mass flow meter (MFC) consists of three basic devices: flow sensor, flow-splitter bypass and printed circuit board, it accurately measures mass flow rates despites gas volume fluctuated due to temperature changes. The MFC is widely applied in the fields of semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting, vacuum system researching, etc.

     

    Typical Application

    The typical applications of MFC include microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma, etching, sputtering, ion implantation and other field such as vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.

     

    Features

    D07-7KM MFC has the advantages of high precision, long service life, excellent repeatability, quick response, soft-start, good reliability, wide operation pressure range(good operation in high pressure or vacuum situation), easy and convenient operation, etc. It can be installed wherever needed and connected with the computer to realize automatic control.

     

    Specification

    Ranges of Flow

    (20,30,50,100,200,300,500) SCCM

    (0~1,2,3,5,10) SLM

    Accuracy

    ±1.5%F.S

    Linearity

    ±1%F.S

    Repeatability

    ±0.2%F.S

    Response-Time

    ≤4 sec

    Temperature Coefficient

    Zero: ≤±0.1%F.S./℃;Span: ≤±0.2%F.S./℃

    Max Pressure

    3MPa

    Operation Temperature

    5℃~45℃

    Sealing Material

    Viton, Neoprene

    Setting/Output Signal

    0V~+5.00V

    (Input Impedance >100K,Output Current≤3ma)

    Power Supply

    +15V   50mA

    -15V   50mA

    Electrical Connection

    D sub 15 pins Female

    Differential Pressure

    <0.01 MPa

    Leak Rate

    1×10-8atm•cc / sec He(1×10-9 Pa•m3 / sec He)

    Standard Joint

    SwagelokΦ8, SwagelokΦ6, SwagelokΦ3, Swagelok1/8”,φ4(Inner)×1 Hose Coupler, VCR1/4”, Swagelok1/4”, φ6(Inner)×1 Hose Coupler

    Media

    All Gas

    Emi

    CE

    Weight

    0.92kg


    Installation Dimension

    1.jpg


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