IKS PVD Technology (Shenyang) Co.,Ltd
Home > Product > Vacuum Coating Accessories > Vacuum Pumps

Product Categories

Contact Information

  • IKS PVD Technology (Shenyang) Co.,Ltd
  • Tel:+86-24-89635131
  • Fax:+86-24-89335192
  • Email:IKS.PVD@foxmail.com
  • ADD:No.83-42 Puhe Road, Shenbei New District, Shenyang City, Liaoning Province, China
  • Turbomolecular Vacuum Pump

    Turbomolecular Vacuum Pump
    TYFB-3600 Turbo-Molecular Vacuum Pump Introduction Turbo molecular pump is a kind of mechanical vacuum pump, within which the gas molecular is brought out by the relative high speed rotation of the multi-step dynamic and static turbo vanes therefore to create an extra high vacuum range. The...
    Product Details:

    Introduction

    Turbo molecular pump is a kind of mechanical vacuum pump, within which the gas molecular is brought out by the relative high speed rotation of the multi-step dynamic and static turbo vanes therefore to create an extra high vacuum range. The turbo-molecular pump features high speed of degassing quantity in the molecular flow area and high compressive ratio, consuming less energy than the diffuser pumps and no oil steam pollution.

     

    TYFB-3600 turbo molecular pump is the one with maximum degassing speed domestically at present, its dynamic vanes’ variable cross-section shape features high intensity and lower in weight. Therefore, the pump’s capability is more reliable and stable.

     

    Our molecular pump has no special requirement for the gas it pumped, and has no memory trace. Because of high compressive ratio for the gas of high molecular weight, the pump can create very clean high vacuum and extra high vacuum without equipping cold trap and oil baffle.

     

    TYFB-3600 turbo molecular pumps uses the precision ceramic bearings as its sustainer, with water cooling as its cooling method, so the cooling water temperature should be under 20 ℃. The pump operation is stable after its rotor‘s dynamic equilibrium. The tri phase mouse cage type motor is used as pump driver. The cone hole axle automatically absorbs lubricant to lubricate the bearings, this method is very easy and reliable.

     

    Specification

    High vacuum flange

    100 ISO-K

    Backing pump flange

    400 ISO-K

    Pumping speed L/S

    3600

    Compressive ratio

    N2

    >109

    H2

    >6X103

    Ultimate pressure (Pa)

    <2×10-8                

    Rotational speed (rpm)

    12600

    Vibration value

    ≤0.15μm

    Bearing

    Ceramic bearing

    Running up time (min)

    10

    Running down time (min)

    20

    (Recommended) Backing pump (L/S)

    30-70

    Cooling mode

    Water cooling

    Cooling water temperature (℃)

    <20

    Cooling water flow quantity (L/min)

    1

    Pump body baking temperature (℃)

    <80                

    Ambient temperature (℃)

    5-40

    Installation position

    Vertical ±5°

    Pump weight (kg)

    ≈100

     

    Advantages

    ● Extremely high reliability and long service life.

    ● Ultra high vacuum can be achieved even with high backing pressure levels.

    ● A long-life bearing mechanism (ceramic bearing) reduces maintenance costs.

    ● The pump can be used even in processes with the existence of reaction products and processes using corrosive gas.

    ● Thanks to the sophisticated rotor design, extremely high pumping speed, critical backing pressure and gas throughput values are achieved.

     

    Application

    The TYFB-3600 turbo molecular pump can be used in the field of electronics, metallurgy, chemicals, science technological research and vacuum technology, etc.

     

    Structure Drawing of TYFB3600 Turbo Molecular Pump

    image005.jpg


    Vacuum Speed Curve of TYFB-3600 Turbo Molecular Pump        Compressive Ratio Curve of TYFB-3600 Turbo Molecular

                                                                                                                    Pump to Nitrogen and Hydrogen

    image007.jpg      image009.jpg

     


    The size schematic of TYFB-3600 turbo molecular                            The size schematic of TYFB3600turbo molecular

    pump high vacuum connecting with flange 400 ISO-K                      pump backing connecting with flange 100 ISO-K

    image012.gif      image013.jpg

     


    The mounting size schematic of TYFB3600 turbo molecular pump

    image015.jpg

    image018.jpg



    Related Products
    Feedback: