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  • IKS PVD Technology (Shenyang) Co.,Ltd 
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  • KING TECH CORPORATION
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  • Spare Parts Of Sealing Elements For ZY-0805 Hollow Cathode Multi-Arc Coating Machine

    Spare Parts Of Sealing Elements For ZY-0805 Hollow Cathode Multi-Arc Coating Machine
    List of Spare Parts
    Product Details:


    List of Spare Parts


    NO.Item
    Material
    Qty
    Purpose
    1O-ring φ 830x10FKM
    1
    Cylinder (upper flange)
    2O-ring φ 90x3NBR
    1Cylinder (upper cover plate)
    3O-ring φ 85x4FKM2Cylinder (upper cover plate)
    4O-ring φ 14x3NBR3Cylinder (exhaust port)
    5O-ring φ 24x3NBR1Cylinder (exhaust port)
    6O-ring φ 84x4FKM6Cylinder (inspection window)
    7Convex-ring φ 408x8x8Vacuum Oil resistant rubber1GDQ-400 valve
    8O-ring φ 64x4FKM1GDQ-400 valve
    9O-ring φ 31x4FKM3GDQ-400 valve
    10O-ring φ 458x8NBR1GDQ-400 valve
    11O-ring φ 80x4NBR2Molecular pump unit
    12O-ring φ 70x4NBR1Molecular pump unit 
    13O-ring φ 104x4NBR4Molecular pump unit
    14O-ring φ 108x4NBR3Molecular pump unit
    15O-ring φ 85x4NBR1Molecular pump unit
    16O-ring φ 481x8NBR1Molecular pump unit
    17Skeleton & O-ring 
    2




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