High Vacuum Mass Flow Meter
Introduction The mass flow meter (MFC) consists of three basic devices: flow sensor, flow-splitter bypass and printed circuit board, it accurately measures mass flow rates despites gas volume fluctuated due to temperature changes. The MFC is widely applied in the fields of semiconductor and IC...
- Product Introduction
IKS PVD Technology (Shenyang) Co., Ltd. is one of the most reliable manufacturers and suppliers of high vacuum mass flow meter in China, featured by quality products and low price. If you're going to wholesale cheap high vacuum mass flow meter made in China, welcome to get quotation from our factory.
Specification
Ranges of Flow | （20,30,50,100,200,300,500） SCCM （0~1,2,3,5,10） SLM |
Accuracy | ±1.5%F.S |
Linearity | ±1%F.S |
Repeatability | ±0.2%F.S |
Response-Time | ≤4 sec |
Temperature Coefficient | Zero: ≤±0.1%F.S./℃；Span: ≤±0.2%F.S./℃ |
Max Pressure | 3MPa |
Operation Temperature | 5℃~45℃ |
Sealing Material | Viton, Neoprene |
Setting/Output Signal | 0V~+5.00V (Input Impedance >100K，Output Current≤3ma) |
Power Supply | +15V 50mA -15V 50mA |
Electrical Connection | D sub 15 pins Female |
Differential Pressure | ＜0.01 MPa |
Leak Rate | 1×10-8atm•cc / sec He（1×10-9 Pa•m3 / sec He） |
Standard Joint | SwagelokΦ8, SwagelokΦ6, SwagelokΦ3, Swagelok1/8”,φ4(Inner)×1 Hose Coupler, VCR1/4”, Swagelok1/4”, φ6(Inner)×1 Hose Coupler |
Media | All Gas |
Emi | CE |
Weight | 0.92kg |
Introduction
The mass flow meter (MFC) consists of three basic devices: flow sensor, flow-splitter bypass and printed circuit board, it accurately measures mass flow rates despites gas volume fluctuated due to temperature changes. The MFC is widely applied in the fields of semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting, vacuum system researching, etc.
Features
◆ High precision, long service life, excellent repeatability
◆ Quick response, soft-start, good reliability
◆ Wide operation pressure range (good operation in high pressure or vacuum situation)
◆ Easy and convenient operation
◆ It can be installed wherever needed and connected with the computer to realize automatic control.
Typical Application
The typical applications of MFC include microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma, etching, sputtering, ion implantation and other field such as vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.
Installation Dimension
Packing: 1. Wooden box
2. Carton
3. As your request
Payment: T/T, L/C, etc.
Delivery time: Normally 10~15 days after payment
Shipping: By air or by sea
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