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  • HQ -Foreign Trade Department
  • IKS PVD Technology (Shenyang) Co.,Ltd 
  • Phone:008615040177271 (Wechat/WhatsApp)
  • Email:  IKS.PVD@foxmail.com
  • Add:No.83-42,Puhe Road, Shenbei New District, Shenyang, 110000, Liaoning, China
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  • Tel:+886-6-2137155
  • Fax:886-6-2137667
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  • ADD:Rm. B2, 10F., No.189, Sec. 1, Yongfu Rd., West Central Dist., Tainan City 70051, Taiwan.
  • Spare Parts Of Sealing Elements For ZY-1313 Magnetron Multi-Arc Vacuum Coating Machine

    Spare Parts Of Sealing Elements For ZY-1313 Magnetron Multi-Arc Vacuum Coating Machine
    List of Spare Parts
    Product Details:

    List of Spare Parts

    Seal ring φ 2.5x2.5
    ThermometrySpare psrts*2
    2Lip-type packing L4750Vacuum rubber1Door sealSpare psrts*2
    3O-ring φ 15x4FKM9Gauge holderSpare psrts*2
    4O-ring φ 25x4FKM8HeaterSpare psrts*2
    5O-ring φ 25x4FKM4HeaterSpare psrts*2
    6O-ring φ 458x8NBR2valve
    Spare psrts*2
    7O-ring φ 64x4FKM2valveSpare psrts*2
    8O-ring φ 31x4FKM6valveSpare psrts*2
    9O-ring φ 408x7FKM2valveSpare psrts*2
    10O-ring φ 710x10NBR1UnitSpare psrts*2
    11O-ring φ 170x5NBR1UnitSpare psrts*2
    12O-ring φ 108x5NBR1UnitSpare psrts*2
    13O-ring φ 85x4NBR4UnitSpare psrts*2
    14O-ring φ 104x4NBR2UnitSpare psrts*2
    15O-ring φ 15x4FKM2Gauge holderSpare psrts*2
    16O-ring φ 105x5FKM2Rotating stand
    Spare psrts*2
    17Oil seal 15x35x10Rubber Ⅰ2Pneumatic grating valveSpare psrts*2
    18O-ring φ 42x4NBR2Pneumatic grating valveSpare psrts*2
    19Skeletion oil seal 10x22x7NBR20Arc sourceSpare psrts*2
    20O-ring φ 18x3NBR20Arc sourceSpare psrts*2
    21O-ring φ 108x5FKM10Arc sourceSpare psrts*2
    22O-ring φ 102x5FKM10Arc sourceSpare psrts*2
    23Lip-type packing L3120Rubber Ⅰ2Arc sourceSpare psrts*2
    24O-ring φ 15x2.8FKM4Planar gold targetSpare psrts*2
    25O-ring φ 17x3FKM8Planar gold targetSpare psrts*2
    26O-ring φ 35x3FKM8Planar gold targetSpare psrts*2
    27O-ring φ 145x2FKM4Planar gold targetSpare psrts*2
    28O-ring φ 680x3FKM2Planar gold targetSpare psrts*2
    29Door seal L3000Vacuum rubber1Planar gold targetSpare psrts*2
    30O-ring φ 75x5 FKM4Planar gold targetSpare psrts*2
    31Oil seal 50x75x12Rubber Ⅰ8Planar gold targetSpare psrts*2
    32Oil seal 18x35x7NBR4Planar target baffleSpare psrts*2
    33O-ring φ 15x3FKM2100 Cylindercial targetSpare psrts*2
    34O-ring φ 22x4NBR2100 Cylindercial targetSpare psrts*2
    35Oil seal 35x50x10NBR2100 Cylindercial targetSpare psrts*2
    36O-ring φ 115x5FKM2100 Cylindercial targetSpare psrts*2
    37O-ring φ 125x5FKM2100 Cylindercial targetSpare psrts*2
    38Oil seal 45x65x10FKM4100 Cylindercial targetSpare psrts*2
    39O-ring φ 85x4FKM4100 Cylindercial targetSpare psrts*2
    40O-ring φ 11x4NBR270 Cylindercial targetSpare psrts*2
    41Oil seal 20x36x10NBR270 Cylindercial targetSpare psrts*2
    42O-ring φ 80x5FKM270 Cylindercial targetSpare psrts*2
    43O-ring φ 90x5FKM270 Cylindercial targetSpare psrts*2

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