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Spare Parts Of Sealing Elements For ZY-1313 Magnetron Multi-Arc Vacuum Coating Machine

List of Spare Parts
Product Details:
List of Spare Parts
NO. | Item | Material | Qty | Purpose | Note |
1 | Seal ring φ 2.5x2.5 | FKM | 2 | Thermometry | Spare psrts*2 |
2 | Lip-type packing L4750 | Vacuum rubber | 1 | Door seal | Spare psrts*2 |
3 | O-ring φ 15x4 | FKM | 9 | Gauge holder | Spare psrts*2 |
4 | O-ring φ 25x4 | FKM | 8 | Heater | Spare psrts*2 |
5 | O-ring φ 25x4 | FKM | 4 | Heater | Spare psrts*2 |
6 | O-ring φ 458x8 | NBR | 2 | valve | Spare psrts*2 |
7 | O-ring φ 64x4 | FKM | 2 | valve | Spare psrts*2 |
8 | O-ring φ 31x4 | FKM | 6 | valve | Spare psrts*2 |
9 | O-ring φ 408x7 | FKM | 2 | valve | Spare psrts*2 |
10 | O-ring φ 710x10 | NBR | 1 | Unit | Spare psrts*2 |
11 | O-ring φ 170x5 | NBR | 1 | Unit | Spare psrts*2 |
12 | O-ring φ 108x5 | NBR | 1 | Unit | Spare psrts*2 |
13 | O-ring φ 85x4 | NBR | 4 | Unit | Spare psrts*2 |
14 | O-ring φ 104x4 | NBR | 2 | Unit | Spare psrts*2 |
15 | O-ring φ 15x4 | FKM | 2 | Gauge holder | Spare psrts*2 |
16 | O-ring φ 105x5 | FKM | 2 | Rotating stand | Spare psrts*2 |
17 | Oil seal 15x35x10 | Rubber Ⅰ | 2 | Pneumatic grating valve | Spare psrts*2 |
18 | O-ring φ 42x4 | NBR | 2 | Pneumatic grating valve | Spare psrts*2 |
19 | Skeletion oil seal 10x22x7 | NBR | 20 | Arc source | Spare psrts*2 |
20 | O-ring φ 18x3 | NBR | 20 | Arc source | Spare psrts*2 |
21 | O-ring φ 108x5 | FKM | 10 | Arc source | Spare psrts*2 |
22 | O-ring φ 102x5 | FKM | 10 | Arc source | Spare psrts*2 |
23 | Lip-type packing L3120 | Rubber Ⅰ | 2 | Arc source | Spare psrts*2 |
24 | O-ring φ 15x2.8 | FKM | 4 | Planar gold target | Spare psrts*2 |
25 | O-ring φ 17x3 | FKM | 8 | Planar gold target | Spare psrts*2 |
26 | O-ring φ 35x3 | FKM | 8 | Planar gold target | Spare psrts*2 |
27 | O-ring φ 145x2 | FKM | 4 | Planar gold target | Spare psrts*2 |
28 | O-ring φ 680x3 | FKM | 2 | Planar gold target | Spare psrts*2 |
29 | Door seal L3000 | Vacuum rubber | 1 | Planar gold target | Spare psrts*2 |
30 | O-ring φ 75x5 | FKM | 4 | Planar gold target | Spare psrts*2 |
31 | Oil seal 50x75x12 | Rubber Ⅰ | 8 | Planar gold target | Spare psrts*2 |
32 | Oil seal 18x35x7 | NBR | 4 | Planar target baffle | Spare psrts*2 |
33 | O-ring φ 15x3 | FKM | 2 | 100 Cylindercial target | Spare psrts*2 |
34 | O-ring φ 22x4 | NBR | 2 | 100 Cylindercial target | Spare psrts*2 |
35 | Oil seal 35x50x10 | NBR | 2 | 100 Cylindercial target | Spare psrts*2 |
36 | O-ring φ 115x5 | FKM | 2 | 100 Cylindercial target | Spare psrts*2 |
37 | O-ring φ 125x5 | FKM | 2 | 100 Cylindercial target | Spare psrts*2 |
38 | Oil seal 45x65x10 | FKM | 4 | 100 Cylindercial target | Spare psrts*2 |
39 | O-ring φ 85x4 | FKM | 4 | 100 Cylindercial target | Spare psrts*2 |
40 | O-ring φ 11x4 | NBR | 2 | 70 Cylindercial target | Spare psrts*2 |
41 | Oil seal 20x36x10 | NBR | 2 | 70 Cylindercial target | Spare psrts*2 |
42 | O-ring φ 80x5 | FKM | 2 | 70 Cylindercial target | Spare psrts*2 |
43 | O-ring φ 90x5 | FKM | 2 | 70 Cylindercial target | Spare psrts*2 |
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