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  • IKS PVD Technology (Shenyang) Co.,Ltd 
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  • Spare Parts Of Sealing Elements For ZY-1713 Magnetron Sputtering Vacuum Coating Machine

    Spare Parts Of Sealing Elements For ZY-1713 Magnetron Sputtering Vacuum Coating Machine
    List of Spare Parts
    Product Details:

    List of Spare Parts

    1Lip-type packing L5400
    Vacuum rubber1
    2O-ring φ 125x4FKM2Inspection window
    3O-ring φ 105x4FKM4Inspection window
    4Oil seal 8x22x7FKM4Inspection window
    5O-ring φ 20x4FKM2Inspection window
    6O-ring φ 2.5x2.5FKM2Thermometry
    7O-ring φ 6x3NBR18Air inflation group
    8O-ring φ 25x4FKM12Heater
    9O-ring φ 100x4NBR20Cylindrical blind plate
    10O-ring φ 815x6FKM4Target blind plate
    11O-ring φ 200x4NBR1Bottom cover blind plate
    12O-ring φ 120x3FKM10Arc source blind plate 1
    13O-ring φ 18x3FKM10Arc source blind plate 2
    14O-ring φ 42x4NBR6Grating valve blind plate
    15O-ring φ 205x5FKM6Top cover flange 1
    16O-ring φ 320x5FKM4Top cover flange 2
    17O-ring φ 54x3FKM1Rotating stand
    18O-ring φ 180x6FKM1Rotating stand
    19O-ring φ 200x6FKM1Rotatinc
    20O-ring φ 15x4NBR2Gauge
    21O-ring φ 16x3Silicone9Cylindrical target
    22Oil seal 25x42x7Silicone18Cylindrical target
    23O-ring φ 90x5Silicone18Cylindrical target
    24Oil seal 32x62x10Silicone27Cylindrical target
    25O-ring φ 640x3NBR1Ion source
    26O-ring φ 630x2.65NBR1Ion source
    27O-ring φ 2x1.8NBR1Ion source
    28O-ring φ 4x2.5NBR4Ion source
    29O-ring φ 70x3.55NBR1Ion source
    30O-ring φ 90x3.55NBR1Ion source
    31O-ring φ 13x2NBR4Ion source
    32O-ring φ 7x2.65NBR14Ion source
    33Skeleton oil seal 10x22x7NBR10Arc source
    34O-ring φ 18x3NBR10Arc source
    35O-ring φ 105x5FKM5Arc source
    36O-ring φ 108x5FKM5Arc source
    37O-ring φ 815x6NBR2Arc source
    38O-ring φ 65x4NBR3Unit
    O-ring φ 160x5NBR2Unit

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