Spare Parts Of Sealing Elements For ZY-1713 Magnetron Sputtering Vacuum Coating Machine
List of Spare Parts
- Product Introduction
IKS PVD Technology (Shenyang) Co., Ltd. is one of the most reliable manufacturers and suppliers of spare parts of sealing elements for zy-1713 magnetron sputtering vacuum coating machine in China, featured by quality products and low price. If you're going to wholesale cheap spare parts of sealing elements for zy-1713 magnetron sputtering vacuum coating machine made in China, welcome to get quotation from our factory.
List of Spare Parts
| NO. | Item | Material | Qty | Purpose |
| 1 | Lip-type packing L5400 | Vacuum rubber | 1 | Cylinder |
| 2 | O-ring φ 125x4 | FKM | 2 | Inspection window |
| 3 | O-ring φ 105x4 | FKM | 4 | Inspection window |
| 4 | Oil seal 8x22x7 | FKM | 4 | Inspection window |
| 5 | O-ring φ 20x4 | FKM | 2 | Inspection window |
| 6 | O-ring φ 2.5x2.5 | FKM | 2 | Thermometry |
| 7 | O-ring φ 6x3 | NBR | 18 | Air inflation group |
| 8 | O-ring φ 25x4 | FKM | 12 | Heater |
| 9 | O-ring φ 100x4 | NBR | 20 | Cylindrical blind plate |
| 10 | O-ring φ 815x6 | FKM | 4 | Target blind plate |
| 11 | O-ring φ 200x4 | NBR | 1 | Bottom cover blind plate |
| 12 | O-ring φ 120x3 | FKM | 10 | Arc source blind plate 1 |
| 13 | O-ring φ 18x3 | FKM | 10 | Arc source blind plate 2 |
| 14 | O-ring φ 42x4 | NBR | 6 | Grating valve blind plate |
| 15 | O-ring φ 205x5 | FKM | 6 | Top cover flange 1 |
| 16 | O-ring φ 320x5 | FKM | 4 | Top cover flange 2 |
| 17 | O-ring φ 54x3 | FKM | 1 | Rotating stand |
| 18 | O-ring φ 180x6 | FKM | 1 | Rotating stand |
| 19 | O-ring φ 200x6 | FKM | 1 | Rotatinc |
| 20 | O-ring φ 15x4 | NBR | 2 | Gauge |
| 21 | O-ring φ 16x3 | Silicone | 9 | Cylindrical target |
| 22 | Oil seal 25x42x7 | Silicone | 18 | Cylindrical target |
| 23 | O-ring φ 90x5 | Silicone | 18 | Cylindrical target |
| 24 | Oil seal 32x62x10 | Silicone | 27 | Cylindrical target |
| 25 | O-ring φ 640x3 | NBR | 1 | Ion source |
| 26 | O-ring φ 630x2.65 | NBR | 1 | Ion source |
| 27 | O-ring φ 2x1.8 | NBR | 1 | Ion source |
| 28 | O-ring φ 4x2.5 | NBR | 4 | Ion source |
| 29 | O-ring φ 70x3.55 | NBR | 1 | Ion source |
| 30 | O-ring φ 90x3.55 | NBR | 1 | Ion source |
| 31 | O-ring φ 13x2 | NBR | 4 | Ion source |
| 32 | O-ring φ 7x2.65 | NBR | 14 | Ion source |
| 33 | Skeleton oil seal 10x22x7 | NBR | 10 | Arc source |
| 34 | O-ring φ 18x3 | NBR | 10 | Arc source |
| 35 | O-ring φ 105x5 | FKM | 5 | Arc source |
| 36 | O-ring φ 108x5 | FKM | 5 | Arc source |
| 37 | O-ring φ 815x6 | NBR | 2 | Arc source |
| 38 | O-ring φ 65x4 | NBR | 3 | Unit |
| 39 | O-ring φ 160x5 | NBR | 2 | Unit |
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