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General Purpose Mass Flow Controller - MKS 1179C
The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 mass flow controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as...
- Product Introduction
INTRODUCTION
The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 mass flow controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.
The 1179C is a direct form-fit-function replacement for the most common MFCs on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.
FEATURES & BENEFITS
◆ Patented 1 sensor design provides exceptional zero stability
◆ Full Scale flow ranges from 10 sccm to 20 slm for precise and repeatable flow measurement and control
◆ Percent of Full Scale accuracy for analog configurations
◆ Fast warm-up time minimizes expensive production downtime
◆ Compatible with earlier MKS MFC and power supply/readout modules
◆ Rigorous design and testing includes MTBF analysis and STRIFE testing to ensure long-term performance
◆ Surface finish of wetted stainless surfaces, cleanroom processing, and minimal use of elastomer seals enable use in demanding clean processes
◆ Two year warranty ensures quality and customer satisfaction
STRUCTURE
A cross section diagram of a 1179C Mass-Flo Controller
Flow Accuracy and Repeatability
The above graph shows the typical flow accuracy and repeatability ofanalog MFCs in the 1179C family. Measurements were made using theMKS Instruments Califlow ® Primary Standard Flow Calibrator over a 10 day period.
Zero Stability
The above graph shows the excellent zero and span stability of the 1179C sensor used in the 1179 family. The instruments were powered on and randomly tested for zero and span drift over a 19 month period.
SPECIFICATION
| Full Scale Ranges (N 2 equivalent) | 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm | |
| Maximum Inlet Pressure | 150 psig | |
Normal Operating Pressure Differential (with atmospheric pressure at the MFC outlet) | 10 to 5000 sccm | 10 to 40 psid |
| 10000 to 30000 sccm | 15 to 40 psid | |
| Control Range | 2% to 100% of F.S. | |
Accuracy (analog) (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C) | ±1.0% of F.S. | |
| Repeatability | ±0.2% of F.S. | |
| Resolution | 0.1% of F.S. | |
| Temperature Coefficients | Zero | <0.05% of F.S./°C |
| Span | <0.08% of Rdg./°C | |
| Warm-up Time (to within 0.2% of F.S. of steady state performance) | <2 min | |
| Controller Settling Time (per SEMI Guideline E17-91) | <2 sec | |
| Pressure Coefficient | <0.02% of Rdg./psi | |
| Normal Operating Temperature Range | 0°C to 50°C | |
| Input Voltage Required | Max. current at start-up (first 2 sec) | ±15 VDC (±5%) @ 200 mA |
| Typical current at steady state | ±15 VDC (±5%) @ 100 mA | |
| Set Point Command Signal | 0 to 5 VDC from <20K Ω | |
| Output Signal | 0 to 5 VDC into >10K Ω | |
| Output Impedance | <1 Ω | |
Connector Types Analog | 9-pin or 15-pin Type “D” (The 15-pin Type “D” connector is electronically compatible with other MKS flow controllers. Consult Applications Engineering for details.) | |
| Wetted Materials | Standard | 316L S.S., Viton ® , nickel |
| Optional (seals and valve seat) | Buna-N, Neoprene ® , Kalrez ® | |
| Leak Integrity | External (scc/sec He) | <1 x 10 -9 |
| Through closed valve | <1.0% of F.S. at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.) | |
| Fittings (compatible with) | Swagelok ® 4 VCR ® , Swagelok ® 4 VCO ® , ¼'' Swagelok | |
| Compliance | CE | |
DIMENSIONAL DRAWING
Note: Unless otherwise specified,dimensions are nominal values in inches(mm referenced).
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