Cryogenic pump oil-free ultra-high vacuum system
Oct 31, 2023| Cryogenic pump oil-free ultra-high vacuum system
The cryogenic pump is used as the main pump, and the parallel or series molecular sieve adsorption pump (for pre-pumping vacuum pump) is used. The vacuum system can also use a mechanical pump as a pre-vacuum pump, but the oil vapor trap must be set in the inlet pipe of the mechanical pump.
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