Crystallization direction of target material performance requirements
Jan 19, 2022| Crystallization direction of target material performance requirements
Understand the grain size (material itself) affect the performance of the target material, we cannot simply process, crystallization direction to the performance requirements of the target, because when the sputtering target material atoms easily along with the orientation of atomic six-party closely preferential sputtering, therefore, to achieve a high sputtering rate, but by changing the crystal structure of target method to increase the sputtering rate. Different materials have different crystal structures, so different molding and heat treatment methods should be adopted.
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