How to control the flow rate of argon gas in the vacuum coating industry?

How to control the flow rate of argon gas in the vacuum coating industry?

In terms of the gas used to adjust the pressure during coating, I think as follows: Argon if the pressure is only adjusted, the primary pressure can be excluded, but the secondary pressure should be less than 0.5 atmospheres. Nitrogen, too, mainly because if it's too big, the pressure in the vacuum chamber will change too much, causing an error. If an ion source is used, the argon gas intake should not be too large, which will lead to too much ion and burn out the parts. The pressure is no different.
Any solid material in the atmospheric environment will dissolve and adsorb some gases, when the material is placed in a vacuum, because of desorption, analysis, and gas. The rate of exgassing is proportional to the gas content in the material. Different materials resolve the composition of the gas and the temperature and time of resolution are different.
The pumping rate of different components of the gas is also different. When vacuuming, the atmosphere in the container is first removed (this part of the gas is quickly removed, and the gas in the furnace is basically exhausted at 10-1Pa), and then the gas is desorbed on the surface of the material, the gas diffused from the inside of the material to the surface, and the gas permeated into the vacuum through the wall of the device. Therefore, after the goods into the furnace, to carry out heat preservation degassing, because the goods in the furnace before adsorption of some impurities, we have to pass the appropriate heating, so that the gas analytical desorption of the surface of the goods. Take stainless steel as an example, in addition to the gas adsorption on its surface, in the process of continuous heating and insulation will also precipitate some gas inside the steel, the presence of these gases often have a greater impact on the purity and color of the film, the film adhesion is also a great influence.
Therefore, when vacuum coating machine coating, the quality of the film layer, gas plays a key role, is an indispensable step in the process of coating.

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