Magnetron sputtering film gray black or dark, how to solve

Magnetron sputtering film gray black or dark, how to solve
● Vacuum degree less than 0.67Pa; The vacuum should be increased to 0.13-0.4Pa.
Argon purity is less than 99.9%; Argon should be replaced with 99.99% purity.
● inflation system leakage; The inflation system should be checked to eliminate air leaks.
● The film is not fully cured; The curing time of the film should be extended appropriately.
● The amount of gas discharged from the plated parts is too large; It should be dried and sealed.

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