Sputtering ion pump - Titanium sublimation pump set
Aug 31, 2021| Sputtering ion pump - Titanium sublimation pump set
1.Vacuum chamber 2. Ultra-high vacuum gate valve 3. Sputtering ion pump - Titanium sublimation pump set 4. Ultra-high vacuum gate valve 5. Cold trap 6. Diffusion pump 7. Release valve 10. Mechanical vacuum pump
FIG. 2 Combined ultra-high vacuum system
Figure 2 shows another type of combined ultra-high vacuum system. The system is suitable for vacuum sealing furnaces, tantalum chip furnaces, and other equipment. The main pump of the system is the sputtering ion pump and titanium sublimation pump set. The limit vacuum of the vacuum chamber can reach 5×10-7Pa. The system is equipped with a unit composed of an oil diffusion pump and mechanical pump, which is used for crude pumping and pre-pumping pump as the main pump and can simultaneously pump out a large amount of gas released during the process.
IKS PVD company, decorative coating machine, tools coating machine, optical coating machine, PVD vacuum coating line, the turn-key project is available. Contact us now, E-mail: iks.pvd@foxmail.com