Two-stage Roots pump combined with water ring pump and oil seal mechanical pump

Two-stage Roots pump combined with water ring pump and oil seal mechanical pump

Figure 5-10 shows a vacuum unit composed of a two-stage ZJ Roots pump, a one-stage water ring pump (limit pressure P0=6700Pa), and a gas ballast oil seal mechanical pump, whose limit pressure can reach 10-2Pa. When it is necessary to pump a large amount of water steam, close valve 8, water ring pump to do crude pumping pump and front pump, when the partial pressure of water steam reaches 300~1300Pa, close valve 5, open the valve 8, and use the gas ballast mechanical pump to do the front pump.

▲ Figure 5-10 Two-stage Roots pump with water ring pump and oil seal mechanical pump unit: 1-condenser 2-ZJ600 Roots pump 3-ZJ150 Roots pump 4-crude pump 5-front valve 1 6-ZSK3 water ring pump 7-2H70 slide valve pump 8-front valve 2

IKS PVD company, decorative coating machine, tools coating machine, DLC coating machine, optical coating machine, PVD vacuum coating line, the turn-key project is available. Contact us now, E-mail: iks.pvd@foxmail.com