Acquisition, Application And Detection Of High Vacuum, Ultra-high Vacuum And Extremely High Vacuum

Acquisition, application and detection of high vacuum, ultra-high vacuum and extremely high vacuum

It is only by examining the differences in the degree of vacuum at the molecular level that we can appreciate how difficult it is to achieve and use high vacuum (HV), ultra-high vacuum (UHV) and extremely high vacuum (XHV).

In coarse vacuum and medium vacuum, the main gas source is the cavity gas or the original gas. In high vacuum and ultra-high vacuum, the gas is mainly caused by the gas desorption on the surface of the cavity. In extremely high vacuum, the gas mainly comes from the cavity wall and permeates with gas from other materials.

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