Discharge Morphology Of Various Coating Technologies

▲ Figure 1 Discharge morphology of various coating technologies

FIG. 1 shows the discharge morphologies in various ion plating techniques. The intensity of light from an arc discharge is much greater than that from a glow discharge. The upper left and upper middle are glow discharges. On the right is the hollow cathode arc discharge light, on the lower left is the cathode arc ion plating light, and on the lower right is the arc PECVD coating light. In recent years, the process of vacuum coating and workpiece cleaning is developing toward arc discharge

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