DLC Pulsed Laser Deposition (PLD)
Jan 12, 2024| DLC pulsed laser deposition (PLD) means that the pulsed laser beam is introduced into the cavity through the focusing lens and the quartz window, and projected on the rotating graphite target. Under the action of the laser with high energy density, the laser plasma discharge is formed, the carbon ions produced have the energy of 1keV, and the quad-coordination structure of the sp3 bond is formed on the matrix. Finally, form a diamond-like film. With a high deposition rate, hydrogen-free diamond-like films with high sp3 content can be obtained, but the energy consumption is high and the deposition area is small.
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