Effect Of Metal Doping On Ta-C Internal Stress (doped Metal Types: Cu, Ti, Fe)
Dec 30, 2023| Effect of metal doping on ta-C internal stress (doped metal types: Cu, Ti, Fe)
1, when the metal content is low, the proportion of hardness reduction is less than the proportion of stress reduction, when the doping amount is very small, the friction coefficient is basically unchanged. 2, the hardness of the film with the doped metal content of the change of the relationship is basically the same, more importantly, doping different metal elements, the hardness value is very close.
After Ar ion assisted, the surface roughness has been greatly improved, and can reach Ra0.4nm. After Ar+ treatment, the surface of the film becomes smooth and flat, and the friction coefficient is reduced from 0.14 to 0.1. ta-C hardness 5500Hv, elastic modulus 430GPa, stress 2.1GPa, thickness 1.5μm; The life of ta-C film is increased by about 100 times.
What is the silicon source for silicon-doped DLC?
SiC containing less Si
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