IKS PVD Technology (Shenyang) Co.,Ltd
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  • HQ -Foreign Trade Department
  • IKS PVD Technology (Shenyang) Co.,Ltd 
  • Phone:008615040177271 (Wechat/WhatsApp)
  • Email:  IKS.PVD@foxmail.com
  • Add:No.83-42,Puhe Road, Shenbei New District, Shenyang, 110000, Liaoning, China
  • Worldwide Sales Representative
  • Tel:+886-6-2137155
  • Fax:886-6-2137667
  • Email:info@kingtechcorp.com
  • ADD:Rm. B2, 10F., No.189, Sec. 1, Yongfu Rd., West Central Dist., Tainan City 70051, Taiwan.
  • Electron Beam Evaporation Systems
    Sep 12, 2018


    Electron beam and thermal evaporation systems. Planetary or simple rotation stages can include heating to temperatures greater than 950°C, depending on substrate size and material. Ion sources for IBAD and substrate pre-cleaning can be integrated into systems as well. Evaporation systems come with complete pumping stations, manual or electro-pneumatic valves, all vacuum gauges, a power distribution box, electronic racks, water and air manifolds, and safety interlocks. Systems can be operated manually or via computer control. Substrate heaters and manipulators can be designed for non-standard substrate shapes and sizes. Applications include basic materials research, SAW devices, silicon and GaAs wafer metallization, MEMS or display technology, and more.


    Many system options are available, including a wide range of electron beam and thermal sources, power supplies, integration of ion beam or magnetron sputter sources, RGA’s, UHV capability, multi-wafer load locks, and in-situ monitors.