Important Characteristics Of Bias Power Supply

Important characteristics of bias power supply

Number of arc-outs per minute (in number of arc-outs per minute) · · sensitivity to detect large arcs (mJ/kW detectable arc energy) · Load characteristics of bias Bias The working load is plasma, and when DC bias is used, the plasma shows resistance; When pulsed bias is used, the plasma exhibits resistance + capacitance, which can be considered as a series of resistors and capacitors, and the nature of the capacitance is caused by the plasma sheath on the surface of the substrate.

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