PECVD equipment common problems-Poor film forming quality
Jul 03, 2023| PECVD equipment common problems-Poor film forming quality
(1) The sample surface cleanliness is poor, check whether the sample surface is clean.
(2) The cleanliness of the process chamber is poor, and the process chamber is cleaned.
(3) If the sample temperature is abnormal, check whether the temperature control system is normal and calibrate the temperature measuring thermocouple.
(4) Abnormal pressure in the process of film deposition, check the leakage rate of the cavity vacuum system.
(5) If the RF power is improperly set, check the RF power supply and adjust the set power.
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