Preparation Of (Cr,Ti,Al) N Quaternary Coatings Common Magnetron Sputtering Coating Technology
Aug 27, 2024| Preparation of (Cr,Ti,Al) N quaternary coatings common magnetron sputtering coating technology
Based on the basic principle and technical characteristics of magnetron sputtering, this paper introduces the common magnetron sputtering technology for the preparation of (Cr,Ti,Al) N four-element coating, analyzes the effect of deposition coating with elemental target and alloy target and their respective advantages and disadvantages, and studies the influence of magnetron sputtering process parameters on the mechanical properties of (Cr,Ti,Al) N coating. The effects of (Cr,Ti,Al) N gradient coatings and their preparation methods are discussed. This paper can provide theoretical reference and guidance for designing the preparation process of (Cr,Ti,Al) N coating and improving the properties of (Cr,Ti,Al) N coating.
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