Ti(Titanium) Target Material

Ti(Titanium) target material

Titanium is one of the most commonly used barrier film materials (corresponding conductive layer material is aluminum) in VLSI chips. The titanium target will be used in conjunction with the titanium ring during the prechip manufacturing process. The main function is to assist titanium target to complete sputtering process, which is mainly used in the field of ultra large scale integrated circuit chip manufacturing.
Tantalum target
With the explosive growth of the demand for consumer electronic products such as

smartphones and tablets, the demand for high-end chips has increased significantly, making tantalum metal become a hot mineral resource. However, the scarcity of tantalum resources makes the high purity tantalum target material expensive, which is mainly applied in large-scale integrated circuits and other fields.

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