Characteristics and classification of ultra-high vacuum unit

Characteristics and classification of ultra-high vacuum unit

The ultra-high vacuum units working above 10-5Pa include diffusion pump, molecular pump ultra-high vacuum unit and oil-free ultra-high vacuum unit. The unit has the following characteristics:
(1) the ultimate vacuum degree of the main pump is high, above 10-7~ 10-8Pa;
(2) can withstand high temperature baking of 200~450℃;
(3) The partial pressure of the backflow gas in the main pump is very low;
(4) to be pumped gas selective strong main pump, to be equipped with a large enough auxiliary pump;
The material outlet rate of the vacuum chamber, pipe, valve and other components is very low, and the air leakage rate is very small.

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