Specific measures to eliminate oil vapor backflow in the oil diffusion pump system

Specific measures to eliminate oil vapor backflow in the oil diffusion pump system:
(1) Increase the starting power of the diffusion pump to shorten the pressure transition zone when the mechanical pump switches with the diffusion pump.
(2) Avoid the danger zone of backflow (transition zone) by changing the system operation process and using valves. For example, a high vacuum valve can be opened at a predetermined speed, and it can be gradually opened to ensure that the gas flow into the diffusion pump is lower than its maximum displacement, and the mechanical pump pumping speed to ensure the pressure of the front stage of the diffusion pump so that the diffusion pump can set up work. So we can avoid the transition zone.
(3) Improve the operation process, and adjust the healing power of the diffusion pump to the best power, to avoid the phenomenon of pump oil explosion boiling; In general, the backflow of the diffusion pump will peak in the process of heating and closing, so the high vacuum valve at the pump mouth can be used to control and avoid backflow.
(4) Add liquid hydrogen cold trap or adsorption trap at the entrance of the diffusion pump to capture the flowback oil vapor.
(5) Select a high-quality diffusion pump working fluid

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