Ultra-high vacuum system
Oct 26, 2023| 
Ultra-high vacuum system
A diffusion pump series mechanical pump series cold trap system
Figure 5-13 shows the vacuum system, diffusion pump series two liquid nitrogen cold trap, and the vacuum chamber and cold trap 6 can withstand 400 ~ 450℃ baking. At this temperature, the gas adsorbed on the wall of the vacuum chamber and the wall of the cold trap, and the condensed pump oil can be removed. The system can generally obtain a limit vacuum of 1.33×10-7Pa.
▲ Figure 5-13 Oil diffusion pump ultra-high vacuum system: 1- Vacuum chamber 2- Thermocouple vacuum gauge 3-B-A vacuum gauge 4- Bleed valve 5- Ultra-high vacuum valve 6,7- cold trap 8- ionization vacuum gauge 9- Diffusion pump 10- front pipe valve 11- front trap 12- Solenoid valve 13- Mechanical pump 14- ultra-high vacuum pipe valve 15- baking device
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