What are the causes of nodulation formation on target materials
Aug 26, 2026| What are the causes of nodulation formation on target materials?
① Factors related to the target material itself: uneven element distribution, presence of large particles or impurities, excessive porosity, poor conductivity, etc. ② Improper design of the cathode/magnetron structure: uneven magnetic field distribution, poor binding between the target and the cathode, insufficient cooling, etc. ③ Improper setting of power supply parameters: unstable power supply output, unoptimized arc suppression parameters, etc. Countermeasures? 1. Target material aspect: Use high-density targets, improve purity and uniformity, select materials with excellent conductivity, etc. 2. Process and equipment operation level: Pre-clean the cavity and bake it, regularly wipe the baffles, electrodes, and cavity walls to prevent debris from falling onto the target surface. 3. Use high-frequency power supply or pulse power supply
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