What is target material nodulation
Aug 25, 2026| What is target material nodulation?
In the magnetron sputtering process, target material nodulation is a common but seriously affecting the stability of deposition defect. Target material nodulation refers to the local raised metal "tumor-like" structure formed on the surface of the target material, especially in the non-uniform consumption areas of the target material (as shown in the above figure). These "nodules" are not part of the original target material, but "reverse redeposition products" generated during the sputtering process. After the target material forms lumps, ① the sputtering rate decreases, ② the Arcing frequency increases, and ③ the uniformity of the film layer deteriorates. Therefore, it is necessary to clean the target surface or replace the target material in a timely manner.
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