Bias Impact On The Coating Layers
Aug 15, 2024| Bias impact on the coating layers
The influence mechanism of bias on the film layer is very complex, many companies and scientific research institutions have done a lot of research, on different film layers and different equipment, and the impact of the way and the results are very different, the following list of some of the main effects, you can according to their use of the process, observation and summary, you can quickly find out the influence of bias on the film layer. Film structure, crystal structure orientation, organizational structure 1. Deposition rate 2. Large particle purification 3. Film hardness 4. Film density 5. Surface topography 6. Internal stress
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