Application Of Magnetron Sputtering Technology On (Cr,Ti,Al) N Coatings
Aug 21, 2024| Application of magnetron sputtering technology on (Cr,Ti,Al) N coatings
Transition metal nitride hard coatings are widely used in cutting tools, precision molds and mechanical parts. With the progress of cutting technology and the increase of difficult-to-process materials, hard coatings have been developed from traditional binary coatings to three-element and four-element coatings. (Cr,Ti,Al) N quaternary coatings have attracted much attention because of their excellent comprehensive properties. Based on the basic principle and technical characteristics of magnetron sputtering, this paper introduces the common magnetron sputtering technology for preparing (Cr,Ti,Al) N coating, analyzes the effect of using elemental target and alloy target deposition coating and their respective advantages and disadvantages, and studies the influence of magnetron sputtering process parameters on the mechanical properties of (Cr,Ti,Al) N coating. Finally, the effect of (Cr,Ti,Al) N gradient coating and its preparation method are discussed.
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