Cold Cathode Ionization Vacuum Gauge

Cold cathode ionization vacuum gauge

The cold cathode ionization gauge (often referred to as the Penning gauge) is the same as the hot cathode ionization gauge, which is also composed of two parts of the gauge and the measurement line, but it uses the cold cathode instead of the hot cathode as the ion source of the ionization gauge. The electrons in the cold cathode ionization vacuum gauge work by maintaining discharge under the action of parallel or orthogonal electromagnetic fields.

The measuring range of the cold cathode ionization vacuum gauge can reach 10-2~10-9mbar. The vacuum gauge is simple in structure and easy to service, and although the reading is dependent on the gas type, it can provide a correction factor. However, the measurement uncertainty of cold cathode ionization vacuum meters is between 30% and 50%, and they tend to start discharging in the range of 10-2 to 10-5.

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