Leak Detection For High Vacuum, Ultra-high Vacuum, And Extremely High Vacuum

Leak detection for high vacuum, ultra-high vacuum, and extremely high vacuum

No vacuum device or system can achieve absolute vacuum sealing, and it does not need to be done. It is an indisputable fact that the leakage rate should be low enough so that the required working pressure, gas balance, and limit pressure in the vacuum vessel are not unduly affected. For high, ultra-high, and extremely high vacuums, the only reliable way to detect leakage rates less than 10-7mbar·L/s is with a helium mass spectrometer leak detector. The equivalent diameter of the leak hole is 10-12mbar·L/s, which is also the diameter of the helium molecule and is the smallest leak rate that can be detected. This relationship with helium is one of the reasons helium is used as a tracer gas and mass spectrometers are used for analysis/measurement, and is one of the reasons this method is the most accurate and fast leak detection method.

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