Magnetron Sputtering Deposition Process Of (Cr,Ti,Al) N Gradient Coating

Magnetron sputtering deposition process of (Cr,Ti,Al) N gradient coating

At present, a typical magnetron sputtering process for the (Cr,Ti,Al) N gradient coating can be divided into the following steps:

Ion sputtering cleaning: Ar ion bombardment can remove impurities such as oxides on the substrate surface and also activate the workpiece surface.

Deposition of Cr metal layer: Start Cr target and deposit pure metal Cr bottom layer. There is a good bonding force between the Cr metal layer and the substrate, and the deposition of Cr layer can avoid the direct contact between N element and the Fe matrix, eliminate the common self-brightening layer defects in the coating, and improve the embrittlement of the coating.

Cr-CrN Gradual transition layer: By injecting N2 and adjusting the N2 flow rate, the relative content of Cr element in the coating gradually decreases and the content of N element gradually increases, thus realizing the transition of N component between Cr base layer and CrN layer , effectively avoiding the negative impact of component mutation on the binding strength of the coating, and making the transition between the inner and outer layers of the coating better. At the same time, CrN layer can also improve the impact resistance of coating;

Sedimentation CrN- (Cr,Ti,Al) N gradient intermediate layer: The Ti target and Al target are gradually started, and the N2 flow rate is adjusted to increase the content of N element in the coating, and the content of Al and Ti element is also gradually increased, so that the composition of the middle layer changes in a gradient. Because there is no obvious abrupt interface, the stress concentration problem inside the coating can be improved. This has a good effect on reducing the internal stress of the coating and improving the bonding force and mechanical strength of the coating.

Varieties deposition (Cr,Ti,Al) N top layer: The CrAlTiN top layer keeps the process parameters unchanged, the deposition is uniform, dense, and the composition of each element is stable, eliminating the defects caused by the composition segregation, and meeting the use requirements of cutting tools and other mechanical parts.

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