Measuring Range Of Hot Cathode Ionization Vacuum Gauge

Although the measuring range of hot cathode ionization vacuum gauge can reach 10-2~10-11mbar, when the pressure is too high, the relationship between particle flow and pressure will deviate from linear and tend to saturation. In order to extend the measurement range, Pirani vacuum gauge is usually used at the starting point of the pump (in case of excessive pressure).

In addition, the lower limit of measurement of ordinary hot cathode ionization vacuum meters is about 10-6Pa order of magnitude: When the gate anode is bombarded with electrons, soft X-rays are generated, and photoelectron emission occurs when the ion collector receives this ray. Since the photon emitted by the collector is equivalent to the ions it collects, a pressure-independent background photocurrent is formed in the ion collector circuit, which is represented by a pressure reading of about 10-6Pa when measured. In order to eliminate the effect of background photocurrent and expand the measurement limit of hot cathode ionization vacuum gauge, B-A ionization vacuum gauge (the measurement limit can reach 10-8Pa), suppressive vacuum gauge (theoretically can reach 10-12Pa), modulated vacuum gauge (10-10Pa), separated vacuum gauge (10-11Pa), and so on.

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