Measuring The Pressure

When it comes to measuring the pressure of high vacuum, ultra-high vacuum, and extremely high vacuum, traditional pressure/vacuum gauges are not suitable due to the venting effect mentioned above. Instead, an ionization vacuum gauge can be used to ionize some of the gas molecules that enter the tube, collecting these ions to form an ion stream. Since the ion flow generated by the measured gas molecules is proportional to the pressure of the gas in a certain pressure range, the pressure value of the measured gas can be reflected by measuring the size of the ion flow.

According to the different ionization methods, ionization vacuum meters can be divided into three categories: hot cathode ionization vacuum meters (the most widely used), cold cathode ionization vacuum meters, and radioactive ionization vacuum meters. This paper mainly introduces hot cathode and cold cathode ionization vacuum gauges.

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