PECVD Equipment Common Problems And Treatment Measures-Failure To Glow
Jul 01, 2023| Causes and treatment measures for failure to glow:
(1) If the RF power supply is faulty, check whether the power output of the RF source is normal.
(2) The reaction gas intake volume is small, check whether the gas flowmeter is normal, if normal, increase the intake volume for test.
(3) the cleanliness of the cavity plate is not enough, use a multimeter to measure the ground resistance of the upper and lower plates of the cavity, the normal value should be above tens of megohm, if abnormal, clean the cavity plate.
(4) If the RF matching circuit is faulty, check whether the RF source reflected power is within the normal range. If it is abnormal, check whether the capacitor and inductance in the matching circuit are damaged.
(5) The vacuum degree is too poor, check whether the vacuum degree of the cavity is normal.
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