PECVD Gas And Flow Control Systems

The gas supply of PECVD system is almost always supplied by gas cylinders, which are placed in a gas cabinet with many safety devices, and delivered to the process chamber of PECVD through the control panel on the gas cabinet and pipes.

In the deposition, the amount of the reaction gas will affect the rate of deposition and its uniformity, so it is necessary to strictly control the gas flow, and the mass flow meter is usually used to achieve accurate control.

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