PECVD equipment common problems-The pressure of the reaction chamber is unstable
Jul 05, 2023| PECVD equipment common problems-The pressure of the reaction chamber is unstable
(1) Check whether the bellows of the vacuum system of the equipment have cracks.
(2) Check whether the gas flow meter is normal.
(3) Manually check whether the butterfly valve switch is normal.
(4) The vacuum pump is abnormal, and the vacuum gauge is used to measure whether the pumping speed of the vacuum pump is normal.
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