The factors affecting PECVD process quality mainly include the following aspects
Jul 06, 2023| Two factors should be considered in the selection of pad spacing in PECVD cavity:
(1) Lighting voltage: The selection of spacing should make the lighting voltage as low as possible to reduce the plasma potential and reduce the damage to the substrate.
(2) plate spacing and cavity air pressure: when the plate spacing is large, the damage to the substrate is small, but the spacing should not be too large, otherwise it will increase the edge effect of the electric field and affect the uniformity of deposition. The size of the reaction chamber can increase productivity, but it also has an impact on the uniformity of thickness.
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