PECVD-radio-frequency Power

The greater the power of radio frequency, the greater the bombardment energy of ions, which is conducive to improving the quality of the deposition film. Because the increase of power will enhance the concentration of free radicals in the gas, so that the deposition rate rises linearly with the power, when the power increases to a certain extent, the reaction gas is completely ionized, the free radicals reach saturation, and the deposition rate tends to be stable.

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