Vacuum Coating DLC Process, DLC Process Introduction

Vacuum coating DLC process, DLC process introduction

Diamond-like carbon (Diamond-like carbon for short DLC) is a kind of amorphous carbon, which shows many properties similar to Diamond. DLC often uses diamond-like microstructure as a coating material. In order to make clear the concept of diamond-like carbon, we first study the element carbon Carbon element is widely found in nature. Diamonds, graphite, fullerenes, carbon nanotubes, and so on are formed by carbon elements. Carbon element has three kinds of hybrid bonds, SP1, SP2, and SP3, and different combinations of these three bonds form different molecular structures, thus showing different properties When carbon atoms are covalently bonded with sp3 hybridized orbitals, diamond is formed. When carbon atoms are covalently bonded with SP2 hybridized orbitals, graphite is formed. When carbon atoms are mixed and hybridized with SP2 hybridized orbitals, diamond-like carbon is formed Diamond-like films are often used in the form of high hardness diamond-like films. The amorphous carbon film with high resistivity, good optical properties, and unique tribological properties produces different substances due to the different binding modes between carbon atoms and carbon atoms: Diamond carbon and carbon are bonded in the form of SP3 bond; Graphite (graphite) carbon in the form of SP2 bond; As described in the introduction, diamond-like (DLC) carbon is a metastable form of amorphous carbon generated by the combination of SP3 and SP2 bonds. It has no strict definition and can include amorphous carbon with a wide range of properties, so it has both excellent characteristics of diamond and graphite. Therefore, DLC film derived from diamond-like film is also a metastable, long-range disordered amorphous material, and the bonding mode between carbon atoms is covalent bond, mainly including sp2 and SP3 hybrid bonds, while there are a certain number of C-H bonds in DLC film containing hydrogen Consists of two identical or different atomic orbitals symmetry axis direction along the orbit overlap each other to form a covalent bond, called sigma sigma keys is atomic orbital overlap and form along the axis direction, a large degree of overlap, so the sigma stable sigma keys is to be able to rotate around the axis of symmetry, without affecting the bond strength and the Angle between the key and key (key) According to molecule orbit theory, the two atomic orbitals close after fully, by a linear combination of atomic orbitals, form two molecular orbitals Among them, the energy is lower than the original atomic orbital molecular orbital is called a bonding orbital, the energy is higher than the original atomic orbital molecular orbital is called antibonding orbital For internuclear axis symmetric axis bonding orbital is called sigma orbital, the corresponding key called sigma key For internuclear axis symmetric axis of the antibonding orbital called sigma * orbit, the corresponding key called sigma * key molecules in the ground state, electronic usually form chemical bonds in a bonding orbital, and let the antibonding orbital empty sigma bond is a covalent bond It has the following characteristics: first of all, sigma has direction key, two bonding atoms must be along the axis of symmetry approach, to achieve a large overlap; Secondly, the bonding electron cloud is symmetrically distributed along the bond axis, and the atoms at both ends can freely rotate along the axis without changing the distribution of electron cloud density. Third,σ bonds overlap head-to-head. They overlap more than other bonds and have higher bond energies. Therefore, chemically stable covalent single bonds are σ bonds, covalent double bonds have one σ bond and π bond, and covalent triple bonds are made up of one σ bond and two π bonds

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