Diffusion pump and mechanical pump and cold trap vacuum system

Diffusion pump and mechanical pump and cold trap vacuum system

That drawing is, the vacuum system, diffusion pump in series with two liquid nitrogen cold trap, and the vacuum chamber and cold trap 6 can bake 400 ~ 450℃. At this temperature, the gas adsorbed on the vacuum chamber wall and the cold trap wall, and the condensate pump oil can be removed. The ultimate vacuum of 1.33×10-7Pa can be obtained by this system.

Oil diffusion pump ultra-high vacuum system

1. Vacuum chamber 2. Thermocouple vacuum gauge 3. B-A vacuum gauge 4. Cold trap 8. Ionization vacuum gauge 9. Diffusion pump 10. Front pipeline valve 11. Solenoid valve 13. Mechanical pump 14. Ultra-high vacuum pipe valve

15.Baking device

IKS PVD company, decorative coating machine, tools coating machine, optical coating machine, PVD vacuum coating line, the turn-key project is available. Contact us now, E-mail: iks.pvd@foxmail.com