Guidelines for target binding
Aug 29, 2022| Guidelines for target binding
One of the key parameters that determine the performance of the sputtering target is the integrity and binding rate between the sputtering target and the backplane. This binding is very important for sputtering target performance and cost.
High-quality target binding
High-quality target binding is very demanding. The binding shall be made of a material with low thermal resistance so that the highest possible power can be applied to the target when it is in use, without overheating and cracking the target; The voids after binding must also be minimized to avoid the possibility of target cracking and uneven deposition. The binding must be strong enough to prevent target unbinding during operation, but flexible enough to minimize the formation of residual stresses during binding. The latter stress may cause the target to crack. Finally, the target binding can easily separate the target and the backplane, so that the backplane can be reused.
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