PVD pre-cleaning -Ion bombardment cleaning method
Apr 04, 2025| PVD pre-cleaning -Ion bombardment cleaning method
cleaning method：Ion bombardment cleaning method
cleaning purpose：Remove surface dirt and adsorbate
Cleaning means：Using ion bombardment
Clean through the process：Substrate in 10 ~ 1000 pa applying 0.5-1 kv high-voltage vacuum chamber to produce low amount of glow discharge after make acceleration is fired from the child the substrate surface
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