Vacuum systems are classified according to their operating pressure

Vacuum systems are classified according to their operating pressure

The vacuum system is classified according to its working pressure, which can be divided into: 1) crude vacuum system (working pressure greater than 1330Pa); 2) Low and medium vacuum system (working pressure is 1330~0.13Pa); 3) High vacuum system (working pressure 0.13~1.3×1-6Pa); 4) Ultra-high vacuum system (working pressure is 1.3×10-6Pa ~ 1.3×10-10Pa); 5) Extremely high vacuum system (working pressure below 1.3×10-10Pa).

According to the cleanliness required by the vacuum system, it can be divided into: 1) there is an oil vacuum system (the vacuum chamber has oil vapor pollution); 2) Oil-free vacuum system (vacuum chamber without oil vapor pollution).

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